High efficiency: The high-speed synchronous motion control technology are adopted to meet the requirements of high-efficiency inspection of IC products in allareas.
High detection rate: Feature-based machine learning algorithm are adopted to effectively identify subtle defects andenhance defect inspection rate.
Intelligence: Prescription auxiliary editing function are available, personnel efficiencyand be greatlyimprovedand new product introduction cycle can be greatlyshortened.
Comprehensiveness: The automatic inspection of each process of IC is available, andit has good material compatibility.
Factory automation:It supportsSECS/GEM SEMI standard, which can fully meet the requirements of factory automation.
